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Summary sheet
The promoter, headquartered in Veldhoven, the Netherlands, is one of the world’s leading manufacturers of advanced microlithography equipment for the semiconductor industry.
The project concerns R&D for the development of the next generation of lithography equipment for semiconductor manufacturing, based on the extreme ultraviolet (EUV) technology.
Current lithography systems based on ultraviolet light (UVL) at 193nm have stretched the limits of miniaturisation. EUVL is expected to solve problems that conventional technologies face in their move to 22nm node sizes.
R&D facilities used for semiconductor R&D are not specifically covered by Annexes I & II of EU Directive 97/11/EC, as amended by 2003/35/EC, and therefore are not subject to mandatory Environmental Impact Assessment. The proposed investments will mainly take place inside buildings at R&D facilities already being used for similar activities, and are not expected to have a significant environmental impact on the surroundings. Full environmental details will be assessed during appraisal.
The Promoter is a private company not operating in the Utilities sector, and is thus not covered by EU Directives on procurement.