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Advanced Lithography (RSFF)

Summary sheet

Release date
28 November 2008
Status
Reference
Signed | 01/04/2009
20080370
Project name
Promoter - financial intermediary
Advanced Lithography (RSFF)

The promoter, headquartered in Veldhoven, the Netherlands, is one of the world’s leading manufacturers of advanced microlithography equipment for the semiconductor industry.

Proposed EIB finance (Approximate amount)
Total cost (Approximate amount)
Up to EUR 200 million.
Total project cost is estimated around EUR 500 million.
Location
Sector(s)
Description
Objectives

The project concerns R&D for the development of the next generation of lithography equipment for semiconductor manufacturing, based on the extreme ultraviolet (EUV) technology.

Current lithography systems based on ultraviolet light (UVL) at 193nm have stretched the limits of miniaturisation. EUVL is expected to solve problems that conventional technologies face in their move to 22nm node sizes.

Environmental aspects
Procurement

R&D facilities used for semiconductor R&D are not specifically covered by Annexes I & II of EU Directive 97/11/EC, as amended by 2003/35/EC, and therefore are not subject to mandatory Environmental Impact Assessment. The proposed investments will mainly take place inside buildings at R&D facilities already being used for similar activities, and are not expected to have a significant environmental impact on the surroundings. Full environmental details will be assessed during appraisal.

The Promoter is a private company not operating in the Utilities sector, and is thus not covered by EU Directives on procurement.

Link to source
Summary sheet
Advanced Lithography (RSFF)

Disclaimer

Before financing approval by the Board of Directors, and before loan signature, projects are under appraisal and negotiation. The information and data provided on this page are therefore indicative.
They are provided for transparency purposes only and cannot be considered to represent official EIB policy (see also the Explanatory notes).

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Enquiries and comments concerning the EIB’s involvement in a project or the financing facilities, activities, organisation and objectives of the EIB, can be sent to the EIB Infodesk.
Alternatively, the EIB can be contacted through its external offices.
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The EIB has a zero tolerance policy on fraud or corruption. To report allegations of fraud and corruption relating to EIB-financed projects, please contact the Investigations Division. All reports will be treated as strictly confidential and handled in line with EIB investigation procedures and the EIB Group Anti-Fraud Policy.

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